Argon release, crystallization, morphological and optical changes of ion-beam sputtered Ta2O5 thin films during thermal treatments
A. Paolone, M. Bazzan, G. Favaro, F. Borondics, G. Nemeth, F. Capitani, S. Swaraj, R. Belkhou, R. Flammini, J. Teillon, C. Michel, D. Hofman, M. Granata
11:47, Tuesday, 05 March, 2024