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Title
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SiC films deposition by magnetron sputtering
Author(s)
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M. Bazzan
Document type
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Scientific & Technical note
Code
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VIR-0035B-20
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Date Code requested
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12:41, Friday, 23 April, 2021
Code creator
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bazzan
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https://tds.virgo-gw.eu/ql/?c=15149
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